Having already customers in Europe and Korea using our cluster systems, a first cluster system of the type CS-200-4 sirius has now been delivered to the Chengdu Science & Technology Development Center (CAEP).
Universal Spin Chuck Set
March 2017
Based on commonly used Spin Chuck sizes SAWATEC created a Spin Chuck Set which contains different Spin Chuck sizes starting from specimen 8, 1″, 2″, 4″ and 6″ vacuum chucks.
The chuck holder is an integrated part of the Spin Module SM-150. The Spin Chuck Set is designed for our Spin Module SM-150 but can principally also be used for larger instruments.
Benefits
- Universal Spin Chuck Set that fits interchangeable cuck sizes
- Reduced cost for the capability of handling multiple substrate dimensions
- Faster switching between substrates of different sizes
- No tools required for installation
- Compatible with all SAWATEC Spin Modules
- Clean room applicable metal storage case for chuck sizes not in use
Cooperation with K1 Solutions in South Korea
June 2016
On April 1, 2016 the contract of cooperation between K1 Solutions Inc. and SAWATEC AG was signed. The focus is on the sales and after sales service of the SAWATEC products in the Korean semiconductor market.
K1 Solutions was founded in 1989 and employs today a team of around 15 employees. As a long-term partner for various leading photoresist manufacturers and manufacturers of analytical instruments, K1 Solutions gained the necessary knowledge and experience with respect to the specific customer requirements in the semiconductor industry. The strategic focus on high quality products and services is consistent with the high standards of SAWATEC AG.
The responsible sales and service team of K1 Solutions completed mid-June a comprehensive product training in Switzerland and services from now on customers in South Korea directly .
We look forward to a successful collaboration.
Market launch Spin Module SM 150
January 2016
The successor to the successful spin modules SM-180 is now called SM-150 and will be introduced in mid of April on the market. We are pleased to demonstrate the advantages of the new SM-150 already today.
The proven design features such as the compact design, easy cleaning or the tool-less replacement of the spin chucks have been retained. Compared to the previous models, however, an even more powerful precise AC servo motor is used to improve the acceleration values. In addition, we now offer an innovative two-piece spin chuck set, which easily covers the entire range of cuck sizes.
Opening of Sales and Service Center Greater China
April 2015
Since early April SAWATEC has been working the Chinese market with its subsidiary, Suzhou SAWATEC Semiconductor Systems Co., Ltd.
In doing so, SAWATEC intends to better develop the growth potential of Greater China and strengthen the local customer focus. The market organisation is headed by an experienced management team. In the medium term, this location is to be expanded in keeping with its size and to develop into a regional centre of excellence for sales and after sales service.
Customer-specific cluster system for MEMS application
January 2015
A special cluster system that processes substrates with a great layer thickness in a hard bake process was developed for a Swiss customer from the watch and clock-making supply industry.
The substrates fabricated by means of a LIGA process remain in the 25 stacked HP-250100 hotplates for up to 100 hours. The individual hotplates are charged via the centrally arranged automatic charging station. The project was implemented within less than 9 months, from the project launch to the acceptance by the customer. Meanwhile the cluster system is in full, failure-free operation in the customer’s premises.
