Based on commonly used Spin Chuck sizes SAWATEC created a Spin Chuck Set which contains different Spin Chuck sizes starting from specimen 8, 1″, 2″, 4″ and 6″ vacuum chucks.

The chuck holder is an integrated part of the Spin Module SM-150. The Spin Chuck Set is designed for our Spin Module SM-150 but can principally also be used for larger instruments.


  • Universal Spin Chuck Set that fits interchangeable cuck sizes
  • Reduced cost for the capability of handling multiple substrate dimensions
  • Faster switching between substrates of different sizes
  • No tools required for installation
  • Compatible with all SAWATEC Spin Modules
  • Clean room applicable metal storage case for chuck sizes not in use