MEMS (micro-electro-mechanical systems) products are used in a wide variety of applications and thus the requirements are also very different. MEMS are tiny components that combine logic elements and micromechanical structures in one chip. They can process mechanical and electrical information. Most elements are likely to be sensors and actuators, but also oscillators and filters. These mechatronic chips are usually made of silicon. The structures can be smaller than one micrometre.
MEMS devices require highly specialised equipment to manufacture these mechanical structures. SAWATEC offers the ideal instrument for the production of 3D microstructures with the iSPRAY spray coater. These are used by the watch industry and also by sensor manufacturers for automotive applications.