The requirements for advanced packaging are becoming more and more demanding in order to accommodate as many functions as possible in the smallest space.

Our wide product range covers the different process stages in lithography. The instruments can be adapted to the specific process requirements with modular equipment options. For automated production, SAWATEC cluster systems are the optimal choice and combine all process stages compactly in one system. The cluster systems combine optimal operating costs with unique technological innovations to meet today’s and also future requirements.

→ To the products