We are pleased to introduce the next stage of development of our Cluster Systems:
Our state-of-the-art new generation Cluster System with optimized software, modular design and Load Ports, Chiller Module options as well as the additional Filter Fan Unit!
The new Cluster generation combines innovation and flexibility to easily configure the systems for specific customer requirements. The optionally available 3-stage filter-fan unit ensures higher cleanliness in the process area, the new Chiller Module can be used for more efficient cooling of the Coolplate or for temperature control of the developer lines, and the integrated FOUP Load Ports allow fully automated loading and unloading of the substrates.
Join us on the road to the future of technology and innovation. Contact us today to learn more about how our advanced Cluster System can improve your production in terms of quality and productivity. Let’s redefine what’s possible together!
