A special cluster system that processes substrates with a great layer thickness in a hard bake process was developed for a Swiss customer from the watch and clock-making supply industry.
The substrates fabricated by means of a LIGA process remain in the 25 stacked HP-250100 hotplates for up to 100 hours. The individual hotplates are charged via the centrally arranged automatic charging station. The project was implemented within less than 9 months, from the project launch to the acceptance by the customer. Meanwhile the cluster system is in full, failure-free operation in the customer’s premises.